发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that can be improved in the ease of cutting of a thin film resistor with laser light, and to provide a method of manufacturing the device. SOLUTION: For example, a conductive film 10 is formed directly on the thin film resistor 6. The film 10 is formed so that the film 10 may be disposed in the laser-trimmed area of the resistor 6. Therefore, when the laser trimming is performed, the resistor 6 generates heat due to the laser light and, in addition, the conductive film 10 also generates heat by absorbing the laser light in the portion irradiated with the laser light. Since the heat added to the thin film resistor 6 increases, the ease of cutting of the resistor 6 is improved. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004111680(A) 申请公布日期 2004.04.08
申请号 JP20020272713 申请日期 2002.09.19
申请人 DENSO CORP 发明人 SHIRAKI SATOSHI;KARESUE MASAKAZU
分类号 H01L27/04;H01L21/822;(IPC1-7):H01L21/822 主分类号 H01L27/04
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