GAS ANALYZING APPARATUS USING MASS SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide a gas analyzing apparatus using a mass spectrometer for precisely measuring even the constituent of ultra-low concentration that is superb in quantitative properties in spite of inexpensive and simple configuration. SOLUTION: A sample gas S and a comparison gas R are alternately supplied to an ionization section 3 in the mass spectrometer 1 via a gas channel switching apparatus 10 to modulate fluid and alternately amplify an output signal. COPYRIGHT: (C)2004,JPO