| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room air conditioning system having an outside-air treating air conditioner economically reducing molecular contamination. SOLUTION: The outside-air treating air conditioner 60 provided in this clean room air conditioning system sequentially has a rough filter 32, a first steam coil 34, a blower 36, an intermediate-performance filter 38, a first cooling coil 40, an air washer 42, a second cooling coil 44, a second steam coil 46, and a HEPA filter 48. The air conditioner 60 also has an ionization device 62 between the air washer and the first cooling coil to increase removal efficiency of molecular contamination substance of the air washer. The ionization device emits ultraviolet rays or soft X-rays to efficiently ionize particulate substance in the air. By ionizing the hardly water-soluble molecular contamination substance difficult to collect by a conventional air washer among molecular contamination components in the air, the hardly water-soluble molecular contamination substance can be collected with high collection efficiency. Because the hardly water-soluble molecular contamination component can be captured by the air washer in addition to the water-soluble molecular contamination components, the molecular contamination can be remarkably effectively suppressed as compared to a conventional system. COPYRIGHT: (C)2004,JPO
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