发明名称 METHOD FOR MAKING AN ANISOTROPIC CONDUCTIVE POLYMER FILM ON A SEMICONDUCTOR WAFER
摘要 The invention concerns a method for making an anisotropic conductive polymer film (23, 24) on a semiconductor wafer (T) comprising, on one face, a passivation layer (12) wherein is provided at least one opening exposing a bond pad (11). The invention is useful for forming components (chips, integrated circuits) with high interconnect density.
申请公布号 WO2004012226(A3) 申请公布日期 2004.04.08
申请号 WO2003FR02312 申请日期 2003.07.22
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;SOURIAU, JEAN-CHARLES;RENARD, PIERRE;BRUN, JEAN 发明人 SOURIAU, JEAN-CHARLES;RENARD, PIERRE;BRUN, JEAN
分类号 H01L21/288;H01L21/60;H01L21/68;H01L21/768;H01L23/485;H01L23/532 主分类号 H01L21/288
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