| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical amplification-type positive resist component which supplies new salt, which comprises salt and a resin component, whose various resist abilities such as sensitivity and resolution are satisfactory and which especially gives improved line edge roughness. <P>SOLUTION: The chemical amplification-type positive resist component comprises salt shown by a formula (I) (Q<SP>1</SP>, Q<SP>2</SP>, Q<SP>3</SP>, Q<SP>4</SP>and Q<SP>5</SP>independently show an alkyl group, an alkoxy group or an electron attracting group, which can be branched with hydrogen atoms and number of carbons 1 to 16. At least one of Q<SP>1</SP>, Q<SP>2</SP>, Q<SP>3</SP>, Q<SP>4</SP>and Q<SP>5</SP>is the alkyl group or the alkoxy group that can be branched with the number of carbons 3 to 16, and at least one is the electron attracting group. A<SP>+</SP>shows a counter ion) and resin which has a polymeric unit having a group unstable to acid, which is insoluble or hardly soluble to alkaline water solution but is soluble to it by an operation of acid. <P>COPYRIGHT: (C)2004,JPO |
