| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage equipment, along with an aligner equipped with the stage equipment, in which changes in the position accomanying driving/stopping of a motor is suppressed. SOLUTION: A stage of a stage equipment 10 comprises a stepping motor 17 and is driven by it along a guide part 13. After the stage 11 is stopped, the motor 17 is applied with the current which is less than the excitation current required for driving the motor so that the motor 17 is heated, and the temperature is controlled to a state with the stage 11 being not heated or cooled. Thus, dropping of temperature of the stage 11, after the motor stopped is prevented, to keep the temperature constant, resulting in the suppressed positional fluctuations of the stage 11. COPYRIGHT: (C)2004,JPO |
