| 摘要 |
PROBLEM TO BE SOLVED: To easily convey a large-sized substrate used in production of a liquid crystal panel or the like between chambers to execute required treatment. SOLUTION: In this substrate conveyer for conveying the substrate 40 formed into a thin plane sheet, a carrier 20 is provided to support the substrate 40 and conveyed together with the substrate into a device, a body 22 of the carrier 20 is formed into a frame shape substantially the same as an outer shape of the substrate 40, and the body 22 is provided with a support pin 24 for supporting a side edge part of the substrate 40, and support pin 26 for supporting a position of a scribe line of the substrate 40 in an inside area of the substrate. COPYRIGHT: (C)2004,JPO |
