METHOD AND APPARATUS FOR INDUCTION HEATING OF THIN FILMS
摘要
A method of performing regional heating of a system having a substrate. The method may include applying a thin film to the system, and controllably energizing a coil positioned near the thin film. The energized coils thereby generate a magnetic flux. The method further includes inducing a current in the thin film with the magnetic flux thereby heating the system.
申请公布号
WO03075368(A3)
申请公布日期
2004.04.08
申请号
WO2003US06048
申请日期
2003.02.28
申请人
BOARD OF CONTROL OF MICHIGAN TECHNOLOGICAL UNIVERSITY;BERGSTROM, PAUL, L.;TROMBLEY, MELISSA, L.