| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly precisely control polishing volume in a polishing method in which polishing is performed by revolving a table equipped with polishing cloth by a motor for polishing a target object. <P>SOLUTION: The overall system is arranged to have a process in which torque current values for the motor during polishing are obtained for each of section (1), section (2), section (3), and section (4), in accordance with each stage of polishing, and another process in which the polishing time for the target object is determined based on a multiple regression formula in which the torque current value for each section is made an explanatory parameter. Also polishing equipment designed to execute these processes is provided. <P>COPYRIGHT: (C)2004,JPO |
