发明名称 EUCRYPTITE SINTERED COMPACT AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a eucryptite sintered compact and a method of manufacturing the same in which high purity eucryptite containing &le;1% impurity except a main component, expressed in terms of oxide is sintered even at a low temperature and a sintering zone suitable for densifying is widened. <P>SOLUTION: A ceramic material to be applied also as a member for an electron beam apparatus such as an electron beam plotting apparatus is obtained by molding powder containing &le;1% impurity expressed in terms of oxide and Li 0.5-2.8 mass% in excess of Li quantity of the stoichiometric composition of eucryptite expressed in terms of Li<SB>2</SB>O and sintering at 1,100-1,350&deg;C. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004107097(A) 申请公布日期 2004.04.08
申请号 JP20020267926 申请日期 2002.09.13
申请人 TAIHEIYO CEMENT CORP 发明人 NAKAMURA HIROAKI;ISHII MAMORU;IGUCHI MASAHITO;KATAOKA MASAKO;UMETSU MOTOHIRO
分类号 C04B35/19;H01L21/68;H01L21/683 主分类号 C04B35/19
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