| 摘要 |
PROBLEM TO BE SOLVED: To improve measuring accuracy by improving wetted temperature characteristics by a simple structure and reducing pressure changes in a diaphragm chamber of a pressure cell at temperature changes. SOLUTION: The diaphragm chamber 24 is formed between a diaphragm base 21 and a wetted diaphragm 23. A sealed liquid 15 is sealed in the diaphragm chamber 24, and a spacer 33 is arranged in it. The spacer 3 is made of ceramic, metal, or the like having a coefficient of thermal linear expansion sufficiently larger than that of the diaphragm base 21 and is housed with an appropriate gap 36 in a space part 32 for filling the spacer formed at a wetted surface 21a of the diaphragm base 21. COPYRIGHT: (C)2004,JPO
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