ULTRAVIOLET ERASING APPARATUS

摘要

PURPOSE: An ultraviolet erasing apparatus is provided to measure illumination of an ultraviolet lamp within a short period of time by mounting an illumination sensor in an erasing body and installing an illumination display board connected to the illumination sensor at an erasing controller. CONSTITUTION: An ultraviolet erasing apparatus includes an erasing body(120), a cooling fan(160), and an erasing controller(140). The erasing body(120) includes a sliding door(124) and an ultraviolet lamp. A wafer(80) is loaded on the sliding door(124). The ultraviolet lamp is used for irradiating ultraviolet rays on the wafer. The cooling fan(160) is used for cooling the erasing body heated by the ultraviolet lamp. The erasing controller(140) is used for controlling the cooling fan and the erasing body. An illumination sensor is installed at the sliding door in order to the illumination of the ultraviolet lamp. An illumination display board(145) is connected to the illumination sensor in order to display the measured data of the illumination sensor.