发明名称 Device and method for connecting objects
摘要 A device and method for connecting at least a first object and a second object are disclosed, whereby a vacuum chamber is arranged around the objects for connection, the dimensions of which are determined from the dimensions of the objects such that the chamber can be rapidly evacuated. The objects are pressed together by atmospheric pressure for the connection thereof. The objects can additionally be pressed against each other in a controlled manner.
申请公布号 AU2003280332(A8) 申请公布日期 2004.04.08
申请号 AU20030280332 申请日期 2003.09.12
申请人 SUSS MICROTEC LABORATORY EQUIPMENT GMBH 发明人 DANIEL KAPPES
分类号 H01L21/00 主分类号 H01L21/00
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