| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize an automation of conveying by eliminating the necessity of processing dividing and integrating of a cassette by processing including preceding substrate processing. <P>SOLUTION: A method for processing the substrate includes a step 2 of detecting a substrate existing position in the cassette of a lot, a step 3 of selecting the substrate (preceding substrate) existing at an arbitrary position of the cassette, a step 4 of conveying the preceding substrate to a processing facility, a step 5 of processing the preceding substrate, a step 6 of returning the processed preceding substrate to an original position of the cassette, a step 7 of inspecting the preceding substrate, a step 8 of detecting a substrate existing position in the cassette of the lot, a step 9 of selecting all the substrates (body substrate) except the preceding substrate, a step 10 of conveying the body substrate into the processing facility, a step 11 of processing the body substrate under the condition of feeding back a correction obtained in the inspection of the preceding substrate, and a step 12 of returning the processed body substrate to the original position of the cassette. <P>COPYRIGHT: (C)2004,JPO</p> |
