| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage apparatus which is highly accurately slidable without an X-stage and a Y-stage being badly affected by the magnetic force of a magnetic field magnet, and which can attain easy assembly and a compact structure. SOLUTION: This XY stage apparatus includes the X-stage 2 slidable in the X-direction to a bed 1 through a direct-acting guide unit 6, and the Y-stage 3 slidable in the Y-direction to the X-stage 2 through the direct-acting guide unit 6. Linear motors 4, 5 driving the X-stage 2 and the Y-stage 3 include primary armature coils 9, 11 which are disposed in gaps 13, 15 formed between a pair of field magnets 8, 10 fixed on the bed 1 and the Y-stage 3, and supported on top and bottom surfaces 16, 17 of the X-stage 2. COPYRIGHT: (C)2004,JPO
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