| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable Ag alloy film optical reflection mirror which does not generate film peeling even under the using condition of high temperature and high humidity. SOLUTION: A nitride Cr film 12a is deposited on a substrate 10 used in an optical reflection mirror by the film thickness of≥5nm and≤30nm or a metal Cr film 12c and the nitride Cr film 12b are deposited by the film thickness of≥3nm and≤30nm as a total and turned to the base film of an Ag alloy metal film 11. Thus, the film peeling of the Ag alloy metal film 11 which is a reflection film is prevented and the optical reflection mirror of high reflectance and high light utilizing efficiency in the wide band of visible light is obtained. COPYRIGHT: (C)2004,JPO
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