| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis method capable of preventing pollution caused by an environmental atmosphere, a tool or the like in analyzing metal impurities in a chemical solution and pure water, of easily accomplishing and keeping high cleanliness, and of pretreating an evaluating solution to a required decomposition/condensation specification with a simple process to enable a high-sensitivity and high-accuracy analysis. SOLUTION: A high-cleanliness gas is used in a sealed vessel as a ventilating current; a clean condensation tool is horizontally disposed in it; a chemical solution of an analysis object can be easily subjected to a pretreatment by dripping it on a surface of the tool and by depressurizing and drying it to a level preventing its bumping to cope with the required decomposition/condensation specification. COPYRIGHT: (C)2004,JPO
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