| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation device and an evaluation method of a ferroelectric capacitative element capable of realizing highly accurate polarization evaluation by applying accurately a voltage pulse having a pulse width below 10ns. SOLUTION: A first voltage pulse is applied individually to each polarization evaluation ferroelectric capacitative element group, and the polarization of each ferroelectric capacitative element is aligned in one direction (P101). While applying a second voltage pulse simultaneously to a plurality of polarization evaluation ferroelectric capacitative element groups, the polarization is evaluated (P102). The first voltage pulse is applied individually to each polarization evaluation ferroelectric capacitative element group, and the polarization of each ferroelectric capacitative element is aligned in one direction (P103). A third voltage pulse is applied individually to each polarization evaluation ferroelectric capacitative element group, and thereby the polarization is inverted (P104). While applying the second pulse simultaneously to the plurality of polarization evaluation ferroelectric capacitative element groups, the polarization is evaluated (P105). COPYRIGHT: (C)2004,JPO
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