SPOTTING DEVICE AND SPOTTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pick up technology and a spotting technology not carrying out picking up at a contact system where abrasion of a contact pin and damage of a fine substance are caused. SOLUTION: The spotting device for spotting the fine substance at a designated place is provided with a nozzle means for retaining the fine substance at a tip end and a nozzle moving means for moving the nozzle means in an axial direction of X-Y-Z coordinate. A liquid leading pipe for sucking and retaining a liquid drop drawing the fine substance by surface tension and dropping the fine substance with the liquid drop on the designated place is provided on the nozzle means. COPYRIGHT: (C)2004,JPO