HARD COATED FILM EXCELLENT IN ADHESION AND ITS FORMING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a hard coated film showing an excellent adhesion, even under severe conditions employed for applying direct fuel injection or EGR (exhaust gas recirculation), etc. for reducing Co2and Noxin exhaust gas and improving fuel consumption of an automobile engine, etc. or under conditions for using tools, and its forming process. SOLUTION: The obtained hard coating film comprises a mixed structure comprising 95-99.5% crystalline phase comprising a nitride, carbide or carbonitride of a metal and the balance being an amorphous phase. The hard coating film is formed through PVD method by contacting a substrate with metal vapor and a reactive gas. COPYRIGHT: (C)2004,JPO