| 摘要 |
<p>While shifting the focal point and varying the current values S1 and S2 of two sets of coil in an astigmatism correcting unit, a combination of current values where focal lines (11, 13, 12, 14) having inclinations of 0°, 45°, 90° and 135° with respect to the x axis is determined. A correction sensitivity of astigmatic blur is determined from the combination of current values according to a specified calculation expressions. The correction sensitivity of astigmatic blur can thereby be determined readily in a charged particle beam aligner.</p> |
