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发明名称
Reducing the susceptibility of titanium nitride optical layers to crack
摘要
申请公布号
AU2003216296(A8)
申请公布日期
2004.04.08
申请号
AU20030216296
申请日期
2003.02.18
申请人
SOUTHWALL TECHNOLOGIES, INC.;HUPER OPTIK INTERNATIONAL PTE LTD
发明人
FLOYD E. WOODARD;YISHENG DAI
分类号
B32B17/10;B32B27/36;C03C17/42;C23C14/56;(IPC1-7):G02B5/28;B32B7/10;B32B18/00;F21V9/04;B05D5/06
主分类号
B32B17/10
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