发明名称 INSTRUMENT AND METHOD FOR MEASURING TRANSMITTANCE OF OPTICAL ELEMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an instrument and method by which the initial transmittance of a specimen can be measured accurately. <P>SOLUTION: The instrument which measures the transmittance of the specimen with respect to laser light having prescribed illuminance has a driving means which disposes and withdraws the specimen on and from the optical axis of the laser light, a measuring means which measures the quantity of the laser light, and a means which variably adjusts the illuminance of the laser light projected upon the specimen between the prescribed illuminance and lower illuminance at the time of measuring the transmittance of the specimen. The instrument measures the transmittance of the specimen by utilizing the first measured result obtained by the measuring means by withdrawing the specimen from the optical axis of the laser light and the second measured result obtained by the means in a state where the specimen is disposed on the optical axis of the laser light. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004108989(A) 申请公布日期 2004.04.08
申请号 JP20020273168 申请日期 2002.09.19
申请人 CANON INC 发明人 MURAKAMI EIICHI
分类号 G01N21/59;G01M11/00;G03F1/84;H01L21/027;(IPC1-7):G01M11/00;G03F1/08 主分类号 G01N21/59
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