| 摘要 |
PROBLEM TO BE SOLVED: To provide electron beam irradiators of a non-scanning type where two or more filaments are laid out and which has a structure that can make electric energy supplied to each of the filaments virtually equal. SOLUTION: The electron beam irradiators 10A to 10F are connected to the filaments (1) to (6) which are supplied with the electric energy and a power source 15, and are equipped with electrodes connected to each of the filaments (1) to (6) so as to make the electric energy supplied from the power source 15 to each of the filaments (1) to (6) virtually equal. The electrodes include first electrodes and second electrode, and each of the filaments (1) to (6) is connected to the first electrode and the second electrode respectively. In this case, the electrodes are 22A to 22E. The first electrodes are 22A, 22D and 22E, and the second electrodes correspond to the rest other than the first electrodes. COPYRIGHT: (C)2004,JPO
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