| 摘要 |
PROBLEM TO BE SOLVED: To provide an anisotropic conduction sheet usable in impedance measurement in a high-frequency region at 1GHz or higher, in particular in a high-frequency region at 10GHz or higher, and a probe for measuring impedance which suppresses the occurrence of damage on a substrate to be measured in impedance measurement in a high-frequency region at 1GHz or higher, in particular in a high frequency region at 10GHz or higher and obtains a high measurement reliability. SOLUTION: The anisotropic conduction sheet has a thickness of 10 to 100μm and a number average particle size of conductive particle exhibiting magnetism is 5 to 50μm. The ratio of the thickness W<SB>1</SB>and the number average particle size D of conductive particle exhibiting magnetism, W<SB>1</SB>/D is 1.1 to 10 and the containing fraction of the conductive particle exhibiting magnetism is 10-40% in weight fraction, which is used in impedance measurement in the high-frequency region. The impedance measurement probe is provided with the anisotropic conduction sheet and is used in the high frequency region. COPYRIGHT: (C)2004,JPO
|
