| 摘要 |
PROBLEM TO BE SOLVED: To clean components under an optimized and efficient cleaning condition suitable for the components in a method for cleaning components having recessed structure in contact with super-critical or liquefied carbon dioxide. SOLUTION: Components are cleaned by changing the density of a fluid without changing the phase state of the fluid in a pressurized supercritical condition in contact with the components. In particular, when the density of the components is not more than the liquid density of the fluid, the buoyancy applied to the components is changed by controlling the density of the fluid. Accordingly, the components are vertically moved in the fluid, and the components are efficiently cleaned by generating the agitation effect to prevent the components from being closely attached to each other. Due to the effect, impurities insoluble in the fluid are efficiently removed, and impurities are removed and cleaned to the end of recessed portions of the components with high diffusibility of the super-critical fluid. COPYRIGHT: (C)2004,JPO
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