发明名称 |
Scanning unit and scanning microscope having the same |
摘要 |
A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.
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申请公布号 |
US2004065819(A1) |
申请公布日期 |
2004.04.08 |
申请号 |
US20030616879 |
申请日期 |
2003.07.10 |
申请人 |
OLYMPUS OPTICAL CO., LTD.;TOSHIO ANDO |
发明人 |
ANDO TOSHIO;TODA AKITOSHI |
分类号 |
G01B21/00;G01Q10/04;G01Q20/04;G01Q30/20;G01Q70/04;G02B21/00;G02B21/26;G21K7/00;(IPC1-7):H01J3/14;H01J5/16 |
主分类号 |
G01B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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