WAFER CHUCK ASSEMBLY OF CVD EQUIPMENT

摘要

PURPOSE: A wafer chuck assembly of CVD equipment is provided to load stably a wafer on a chuck by preventing a falling effect of the wafer into the chuck due to the mis-alignment of a flat zone of the wafer. CONSTITUTION: A wafer chuck assembly of CVD equipment includes a chuck(200) and a plurality of chuck pins(300). A wafer(100) induced into a chamber for performing a chemical vapor deposition reaction is loaded on the chuck(200). The chuck pins(300) are projected to an upper portion of the chuck(200) in order to guide the wafer on an upper surface of the chuck(200). The chuck pins(300) are spread from a peripheral part of an opposite edge to a flat zone of the wafer(100) to a side part of the wafer(100).