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发明名称
Compensation of magnetic fields
摘要
申请公布号
GB0404805(D0)
申请公布日期
2004.04.07
申请号
GB20040004805
申请日期
2004.03.03
申请人
IMS NANOFABRICATION GMBH
发明人
分类号
H01J37/20;G05F7/00;H01H47/00;H01L21/027
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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