摘要 |
A method of producing a free standing structure by providing a substrate having a raised pattern, depositing material over said raised pattern and dissolving said substrate from said deposited material leaving a free standing structure of said material. The raised pattern may be planar or a 3D relief pattern with separate upper and lower relief patterns. The material deposited may be aluminium. The structure could be a tag, barcode, motion sensor, accelerometer or antenna. A mould may be used to produce the substrate. Apparatus for performing the method are claimed. Also claimed is a method of making a mould for making the substrate comprising providing a mould material having a sacrificial layer being parallel to the surface of said mould material, masking the surface of said mould material with a pattern to etch though to a stop layer and then etching the mould material with a second etch. |