| 摘要 |
<p>A piezoelectric resonator includes a supporting substrate (10) having an opening or a concavity, a vibrating section (11b) in which at least one pair of an upper electrode (16) and a lower electrode (14) oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film (15), the vibrating portion being formed over the opening or the concavity, and a heat dissipating film (18) disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.</p> |
