发明名称 Epoxy photoresist composition with improved cracking resistance
摘要 A photoimageable composition suitable for use as a negative photoresist comprising about 75% to about 95% by weight of at least one epoxidized polyfunctional bisphenol A formaldehyde novolak resin; about 5% to about 25% by weight of at least one polyol reactive diluent; and at least one photoacid generator in an amount from about 2.5 to about 12.5 parts per hundred parts of resin and reactive diluent, which initiates polymerization upon exposure to near-ultraviolet radiation; dissolved in a sufficient amount of coating solvent.
申请公布号 US6716568(B1) 申请公布日期 2004.04.06
申请号 US20010942521 申请日期 2001.08.29
申请人 MICROCHEM CORP. 发明人 MINSEK DAVID W.;ALEMY ERIC L.
分类号 G03F7/004;G03F7/038;(IPC1-7):G03F7/038;G03F7/38 主分类号 G03F7/004
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