VCSEL with monolithically integrated photodetector

摘要

A VCSEL has an active layer, a photodetector in one of the DBR gratings and with a radiation-absorbing layer that is arranged in an antinode of a laser mode. The laser and the photodetector are electrically driven by a common contact on a thick, heavily doped spacer layer that ensures low laser impedance and little electrical crosstalk between the laser and the photodetector.