发明名称 |
Method for improving substrate alignment |
摘要 |
A method for improving substrate alignment on a stepper comprises imposing predetermined corrections on each of a plurality of substrates, a different set of corrections for each substrate. The actual corrections occurring on the substrates are measured and mathematically processed to produce a matrix and a plurality of equations. The equations are resolved to provide correct corrections for accurate alignment.
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申请公布号 |
US6716649(B2) |
申请公布日期 |
2004.04.06 |
申请号 |
US20020117924 |
申请日期 |
2002.06.17 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
ZIGER DAVID H. |
分类号 |
G03F7/22;G03F9/00;H01L21/027;(IPC1-7):H01L438/14 |
主分类号 |
G03F7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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