发明名称 Aluminum-beryllium alloys for air bridges
摘要 A typical air bridge is an aluminum conductor suspended across an air-filled cavity to connect two components of an integrated circuit, two transistors for example. The air-filled cavity has a low dielectric constant which reduces cross-talk between neighboring conductors and improves speed and efficiency of the integrated circuit. However, current air bridges must be kept short because typical aluminum conductors sag too much. Accordingly, one embodiment of the invention forms air-bridge conductors from an aluminum-beryllium alloy, which enhances stiffness and ultimately provides a 40-percent improvement in air-bridge lengths.
申请公布号 US6717191(B2) 申请公布日期 2004.04.06
申请号 US20030349015 申请日期 2003.01.21
申请人 MICRON TECHNOLOGY, INC. 发明人 FARRAR PAUL A.
分类号 C22C21/00;H01L23/522;H01L23/532;(IPC1-7):C22C21/00;H01L23/58;H01L29/04 主分类号 C22C21/00
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