发明名称 |
MEMS devices and methods of manufacture |
摘要 |
Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.
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申请公布号 |
US6717227(B2) |
申请公布日期 |
2004.04.06 |
申请号 |
US20020079985 |
申请日期 |
2002.02.21 |
申请人 |
ADVANCED MICROSENSORS;FURUKAWA AMERICA, INC. |
发明人 |
TAMURA HIROKAZU;NEAL MATTHEW J.;MUGINO AKIRA;SIDMAN ALAN L. |
分类号 |
B81B3/00;B81B5/00;F04B19/00;F04B43/04;G02B6/35;H01F7/06;H01F7/08;H02K33/16;H02N1/00;(IPC1-7):H01L29/82 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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