发明名称 Method for manufacturing a silicon wafer
摘要 In a method for manufacturing a silicon wafer with an insulating intermediate layer, the surface of a first wafer, which has an insulating intermediate layer, is bonded to the surface of a second wafer, and then the substrate layer and the insulating intermediate layer of the fist wafer are removed. The new silicon surface created in this manner has a high layer quality which is achieved at a low cost.
申请公布号 US6716721(B2) 申请公布日期 2004.04.06
申请号 US20020145169 申请日期 2002.05.13
申请人 ATMEL GERMANY GMBH 发明人 DIETRICH HARRY;DUDEK VOLKER;SCHUEPPEN ANDREAS
分类号 H01L21/762;(IPC1-7):H01L21/30 主分类号 H01L21/762
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