发明名称 |
Multiplex laser light source and exposure apparatus |
摘要 |
Disclosed herein is a multiplex laser light source equipped with a plurality of semiconductor lasers, a single multi-mode optical fiber, and a light-collecting optics system for collecting laser beams emitted from the plurality of semiconductor lasers and then coupling the collected laser beams to the multi-mode optical fiber.
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申请公布号 |
US6718088(B2) |
申请公布日期 |
2004.04.06 |
申请号 |
US20010985855 |
申请日期 |
2001.11.06 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
OKAZAKI YOJI;NAGANO KAZUHIKO |
分类号 |
G03F7/20;G02B3/00;G02B6/06;G02B6/42;H01S5/00;H01S5/022;H01S5/323;H01S5/40;H04N1/036;H04N1/113;(IPC1-7):G02B6/26;G02B6/32;G02B6/30;H01S3/30 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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