METHOD OF FABRICATING LiTaO3 SINGLE CRYSTALLINE SUBSTRATE FOR SURFACE ACOUSTIC WAVE ELEMENT

摘要

PURPOSE: A method of fabricating a LiTaO3 single crystalline substrate for a surface acoustic wave substrate is provided to reduce the lead-time and improve the electric conductivity by performing a reduction process within a short period of time. CONSTITUTION: A reduction process for a LiTaO3 single crystalline ingot or a LiTaO3 single crystalline substrate is performed above the Curie temperature under the reductive atmosphere. A single polarization process for the reduced LiTaO3 single crystalline ingot or the reduced LiTaO3 single crystalline substrate is performed under the reductive atmosphere or the inactive atmosphere. A surface acoustic wave substrate is formed by processing the LiTaO3 single crystalline ingot or the LiTaO3 single crystalline substrate.