SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT HAVING SUSCEPTOR FOR SUPPORTING WAFER

摘要

PURPOSE: Semiconductor device manufacturing equipment having a susceptor for supporting wafer is provided to be capable of reducing the maintenance cost of the equipment and preventing the generation of product failure due to the malfunction of the equipment. CONSTITUTION: Semiconductor device manufacturing equipment is provided with a reaction chamber for carrying out predetermined processes, a susceptor(112) installed at the inner portion of the reaction chamber for supporting a wafer, and a pneumatic distribution assembly(120) installed at the outer portion of the reaction chamber for controlling the vacuum pressure applied to the susceptor and the volume of fluid supplied to the susceptor. At this time, the pneumatic distribution assembly includes a plurality of ports.