WAFER HOLDING RING FOR CHEMICAL AND MECHANICAL POLISHER,申请号KR20037004693-传众专利搜索

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发明名称	WAFER HOLDING RING FOR CHEMICAL AND MECHANICAL POLISHER
摘要
申请公布号	KR20040028643(A)	申请公布日期	2004.04.03
申请号	KR20037004693	申请日期	2003.04.02
申请人		发明人
分类号	H01L21/304;B24B37/04;B24B37/30;B24B37/32;H01L21/683	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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