COOLING DEVICE OF TWO SHAFT JOINT MECHANISM

摘要

PROBLEM TO BE SOLVED: To solve problems wherein a sample holder cannot be efficiently cooled without impairing miniaturization and much time is required to cool down to predetermined temperature. SOLUTION: A two shaft joint mechanism has a head bracket 28, a turn block 39 supported rotatably around a first axial line for the head bracket 28, and a rotary block 52 supported rotatably around a second axial line crossing the first axial line for the turn block 39. It is provided with a first cooling cylinder 69 which has a heat transfer part 69a connected with the head bracket 28 and in which liquid nitrogen is supplied, a second cooling cylinder 73 which has a flexible heat transfer ribbon 72 connected with the head bracket 28 and the turn block 39 and a heat transfer part 73c and in which liquid helium is supplied, and a flexible wire cable 77 connected with the heat transfer part 73c of the second cooling cylinder 73 and the rotary block 52. COPYRIGHT: (C)2004,JPO