| 摘要 |
PROBLEM TO BE SOLVED: To improve damping effect against floor vibration for an active type damping device and exposure device and an exposure device provided with the damper controlling the driving of a controlling object by an actuator to cancel vibration generated on the controlling object. SOLUTION: A feedforward control system 200 compensates a vibration damping system of an exposure device main body based on an output of acceleration sensors 18 instantaneously detecting acceleration of a vibrational component transmitted from a floor face F. A disturbance observer 201 estimates a virtual command value from the vibrational component of the exposure device main body, regards the difference between a command value to voice coil motors 311, 12 and the virtual command value as an estimated disturbance, and corrects the command value based on the estimated disturbance. COPYRIGHT: (C)2004,JPO
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