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发明名称
Method of producing low-capacitance barrier layers in semi-conductor bodies
摘要
申请公布号
US3116174(A)
申请公布日期
1963.12.31
申请号
US19590862560
申请日期
1959.12.29
申请人
TELEFUNKEN G. M. B. H.
发明人
GRUST GERHARD;KAISER REINHOLD
分类号
H01L21/288;H01L21/308
主分类号
H01L21/288
代理机构
代理人
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