| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for inspecting a liquid crystal panel appropriately in accordance with kinds of the liquid crystal panels to be inspected and parameters required for the liquid crystal panel. <P>SOLUTION: A stage mounting part 28 and a probe unit mounting part 36 are constructed so that various stages and probe units, which are respectively set in accordance with a liquid crystal panel module to be inspected, is arbitrarily mounted thereon. Also the device 1 is provided with a filter inserting and removing mechanism part 8 to insert and hold an arbitrary filter means 40 on an inspection optical path of the liquid crystal panel modules and a temperature controlling device 9 to adjust temperature of the liquid crystal panel module by heating or cooling the liquid crystal panel module 100 held on the inspection optical path. <P>COPYRIGHT: (C)2004,JPO |
