| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask transfer pattern laser machining method enabling a highly precise pattern machining such as a boring which requires comparatively high energy density unlike a laser marking. <P>SOLUTION: A pulse type laser beam emitted by a laser oscillator is irradiated to a mask with an aperture of any pattern, and the laser beam which passes through the aperture of the mask is converged onto a workpiece to be machined transferring the pattern of the aperture of the mask for machining. In the mask transfer laser pattern machining method, the pulse type laser beam is scanned over the mask overlapping a portion of cross section of the laser beam for every pulse by a scanner installed on the optical axis between the laser oscillator and the mask while scanning position is moved for every pulse. <P>COPYRIGHT: (C)2004,JPO</p> |
