| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required for detecting the inclination in the arranging directions of pellets and to improve the productivity. SOLUTION: For detecting the arranging directions of the pellets 11 on a wafer 12 supported on a supporting stand, positions of the pellets 11 positioned between two pellets 11A and 11B are detected by passing through the number (n) of the pellets which are set in a setting part 22, and a system moves from the pellet 11A to the pellet 11B at the time of detecting the positions of the two pellets 11A and 11B positioned across the number of the pellets set or a prescribed distance. The number (n) of the pellets to be passed is decided by considering the size and the aspect ratio of the pellet 11, a meandering and a curved arrangement of the pellets 11 on a wafer sheet 13, which occur by stretching of the wafer sheet 13 and the size of dispersion on a rotary direction position of a wafer ring 14 supplied onto the supporting stand. COPYRIGHT: (C)2004,JPO |
