| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing device in which measuring range is expanded and measuring precision is improved using a simple structure and to provide a displacement sensor and a cofocusing microscope. SOLUTION: Laser light beams from a laser diode 11 are passed through a polarizing beam splitter 13, a collimating lens 14, a divergence lens 15 and an object lens 16, converged and irradiated on an object to be measured 17 and reflected and received by a photodiode 19 by the reflection at the beam splitter 13. The lens 15 is minutely vibrated by a tuning fork and the displacement of the object 17 is detected by the position of the lens 15 where the amount of light beams being received by the photodiode 19 becomes maximum. When the position of the lens 15 is varied along the optical axis, the longitudinal magnification of the lens 16 is changed and higher precision and wider range measurement is provided. COPYRIGHT: (C)2004,JPO |
