| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for analyzing motion of a measuring object by highly accurately measuring displacement of the measuring object with the reduced number of device components. SOLUTION: In the motion analysis method, using imaging of a measuring object set by a plurality of measurement marks consisting of a specific mark pattern, a discrete cross-correlation function of the peripheral region of the measurement marks is interpolated with fineness evaluated on the basis of measuring resolution to obtain in succession coordinate values where the discrete image correlation function takes a maximum value. A procedure calculating the time sequence of a displacement of the measurement marks with the image resolution or lower is conducted for each measurement mark and thus the time sequence of the displacement of the measurement marks is obtained. Then, the discrete cross-correlation function is obtained between time sequences of relative motion for each measurement mark with adjacent imaging intervals calculated on the basis of the time sequence of the displacement of each measurement mark. A time interval taking the maximum value is calculated to estimate motion correlation between the measurement marks so that the motion analysis of the measuring object is achieved. COPYRIGHT: (C)2004,JPO
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