| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate, simple and low-cost inspection device and an inspection method. SOLUTION: In the airtight inspection device, a pipe for compressed air for airtight inspection of a submerge type airtight inspection device is provided with a supply pressure regulating mechanism and a pneumatic power detecting mechanism. In this air-tight inspection device, detected output from the pneumatic power detecting mechanism is given for determination of airtight inspection. In the visual submerge type airtight inspection, the detected output from the pneumatic power detecting mechanism of compressed air for airtight inspection provided in the submerge type airtight inspection device is also given for criteria of inspection. COPYRIGHT: (C)2004,JPO
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